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ATHENA 1D:

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ATHENA 1D is a 1D mode of operation of the industry standard ATHENA 2D Process Simulator. ATHENA 1D forms a comprehensive general purpose one-dimensional (1D) process simulator used in the prediction of doping profiles and thicknesses produced by semiconductor processing. It uses the same physical models as ATHENA, SILVACO 2D process simulator widely used in semiconductor industry for design and optimization of various fabrication technologies. ATHENA 1D is thus very accurate and extremely fast. ATHENA 1D is able to simulate a complete process flow in a matter of minutes.

Rev. 091009_01