Elite

ADVANCED PHYSICAL ETCHING AND DEPOSITION SIMULATOR

Elite is an advanced 2D topography simulator for modeling physical etching, deposition, reflow and CMP planarization processes for modern semiconductor technologies. Within the ATHENA framework, Elite provides seamless bi-directional integration with SSuprem4 and Optolith process simulators and contains an additional MC Deposit/Etch Simulator, which provides several Monte Carlo based atomistic etching and deposition models.

Rev. 122107_07