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SSuprem3:

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SSuprem3 is a comprehensive general purpose one-dimensional (1D) process simulator used in the prediction of doping profiles and layer thicknesses produced by semiconductor processing. SSuprem3 is accurate, extremely fast and user friendly. It is able to simulate a complete flow of process steps in a matter of minutes. SSuprem3 can run interactively under DeckBuild for editing process simulation input files and under TonyPlot for graphics and post-processing. SSuprem3 provides interfaces to device simulators that enable simulated profiles to be input for device level simulation. SSuprem3 uses a built-in electrical solver to extract threshold voltages.

Rev. 112107_05