VICTORY PROCESS

3D PROCESS SIMULATOR

VICTORY PROCESS is a general purpose 3D process simulator. VICTORY PROCESS includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit. Proprietary models, as well as public domain research models, can be easily integrated into VICTORY PROCESS using the open modeling interface.

Key Features

• Sophisticated multi-particle and flux models for physical deposition and etching with substrate material redeposition
• Extremely accurate and fast Monte Carlo implant simulation
• Comprehensive set of 3D diffusion models: Fermi, three-stream, and five-stream
• 3D physical oxidation simulation with stress analysis
• Fast 3D structure prototyping capability enables the in-depth physical analysis of specific processing issues
• Accurately predicts 3D topology and 3D dopant distribution
• Automatic meshing and Adaptive Mesh Refinement
• Efficient multi-threading of time critical operations of Monte Carlo implantation, diffusion, oxidation, and physical etching and deposition
• Open architecture allows easy introduction and modification of customer specific physical models
• Seamless link to 3D device simulators including structure mirroring, adaptive doping refinement and electrode specification

Rev. 032310_11